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Papers Benchmarks Datasets Tasks

Mask Generation (OPC) research benchmarks · SOTA2 Research

Mask Generation (OPC)

Benchmarks

Dataset NameSOTA MethodSort

Dataset NameSOTA methodMetricTrendResultsLast Updated

MaskOpt ILT 45 nm metal-layer (test)

46,860L2 Error

5

May 14, 2026

LithoBench ViaSet 45 nm via-layer ILT (test)

4,974L2 Error

5

May 14, 2026

LithoBench MetalSet 32 nm metal-layer ILT (test)

31,915L2 Error

5

May 14, 2026

GAN-OPC synthetic 32 nm M1 (test)

8,107L2 Distance

5

May 14, 2026

MaskOpt EBOPC 45 nm metal-layer (test)

53,642L2 Error

3

May 14, 2026

Popular datasets

LithoBench MaskOpt GAN-OPC

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