ResearchTasksMask Generation (OPC)Mask Generation (OPC)FollowBenchmarksDatasetSOTA methodSortMost resultsRecently updatedMost papersApplyDatasetSOTA methodMetricTrendResultsLast updatedMaskOpt ILT 45 nm metal-layer (test)MorphOPC46,860L2 Error5May 14, 2026LithoBench ViaSet 45 nm via-layer ILT (test)MorphOPC4,974L2 Error5May 14, 2026LithoBench MetalSet 32 nm metal-layer ILT (test)MorphOPC31,915L2 Error5May 14, 2026GAN-OPC synthetic 32 nm M1 (test)MorphOPC8,107L2 Distance5May 14, 2026MaskOpt EBOPC 45 nm metal-layer (test)MorphOPC53,642L2 Error3May 14, 2026