Mask Generation (OPC) on LithoBench MetalSet 32 nm metal-layer ILT (test)
31,915L2 ErrorMorphOPC
Evaluation results
| Method | Links | ||||
|---|---|---|---|---|---|
| MorphOPCTrainable Parameters=44,581,3772026.04 | 31,915 | 4.1 | 41,300 | 499 | |
| DAMOTrainable Parameters=97,545,0892026.04 | 33,704 | 3.8 | 42,306 | 532 | |
| NeuralILTTrainable Parameters=7,787,9052026.04 | 38,065 | 4.1 | 43,753 | 489 | |
| GAN-OPCTrainable Parameters=20,559,6522026.04 | 39,512 | 3.9 | 42,230 | 490 | |
| CFNOTrainable Parameters=1,867,0732026.04 | 43,443 | 3.6 | 44,738 | 350 |