Mask Optimization on ICCAD contest benchmark 2013 (test)
31,915L2 ErrorMorphOPC
Evaluation results
| Method | Links | ||||
|---|---|---|---|---|---|
| MorphOPCPre-trained on=LithoBench2026.04 | 31,915 | 4.1 | 41,300 | 499 | |
| DAMOPre-trained on=LithoBench2026.04 | 33,704 | 3.8 | 42,306 | 532 | |
| NeuralILTPre-trained on=LithoBench2026.04 | 38,065 | 4.1 | 43,753 | 489 | |
| GAN-OPCPre-trained on=LithoBench2026.04 | 39,512 | 3.9 | 42,230 | 490 | |
| MorphOPCPre-trained on=GAN-OPC2026.04 | 42,377 | 2.3 | 44,555 | 120 | |
| CFNOPre-trained on=LithoBench2026.04 | 43,443 | 3.6 | 44,738 | 350 | |
| GAN-OPCPre-trained on=GAN-OPC2026.04 | 47,204 | 2.6 | 47,639 | 136 | |
| DAMOPre-trained on=GAN-OPC2026.04 | 47,251 | 2.7 | 43,652 | 149 | |
| NeuralILTPre-trained on=GAN-OPC2026.04 | 52,859 | 3.1 | 50,484 | 348 | |
| CFNOPre-trained on=GAN-OPC2026.04 | 60,600 | 1.4 | 54,128 | 121 |