Mask Generation (OPC) on MaskOpt ILT 45 nm metal-layer (test)
46,860L2 ErrorMorphOPC
Evaluation results
| Method | Links | ||||
|---|---|---|---|---|---|
| MorphOPCTrainable Parameters=44,581,3772026.04 | 46,860 | 4 | 6,971 | 215 | |
| NeuralILTTrainable Parameters=7,787,9052026.04 | 48,643 | 5 | 6,749 | 187 | |
| DAMOTrainable Parameters=97,545,0892026.04 | 58,972 | 0.4 | 9,082 | 404 | |
| CFNOTrainable Parameters=1,867,0732026.04 | 61,968 | 0.3 | 8,613 | 291 | |
| GAN-OPCTrainable Parameters=20,559,6522026.04 | 65,158 | 0.4 | 8,749 | 376 |