ResearchDatasetsMaskOptMaskOptFollowBenchmarksTaskDatasetSOTA methodSortMost resultsRecently updatedMost papersApplyTaskDatasetSOTA resultTrendResultsMask Generation (OPC)MaskOpt ILT 45 nm metal-layer (test)46,860L2 Error5Mask Generation (OPC)MaskOpt EBOPC 45 nm metal-layer (test)53,642L2 Error3