ResearchBenchmarksMask Generation (OPC) on MaskOpt EBOPC 45 nm metal-layer (test)Mask Generation (OPC) on MaskOpt EBOPC 45 nm metal-layer (test)Follow53,642L2 ErrorMorphOPC53,147.256,487.159,82763,166.9Apr 13, 2026Evaluation resultsMethodMethodLinksL2 ErrorEPEPVBShot CountMorphOPCTrainable Parameters=4...Trainable Parameters=44,581,3772026.0453,6424.98,455108DAMOTrainable Parameters=9...Trainable Parameters=97,545,0892026.0458,66115.37,07296GAN-OPCTrainable Parameters=2...Trainable Parameters=20,559,6522026.0466,01216.66,732111