Mask Generation (OPC) on LithoBench ViaSet 45 nm via-layer ILT (test)
4,974L2 ErrorMorphOPC
Evaluation results
| Method | Links | ||||
|---|---|---|---|---|---|
| MorphOPCTrainable Parameters=44,581,3772026.04 | 4,974 | 8.2 | 9,549 | 274 | |
| DAMOTrainable Parameters=97,545,0892026.04 | 5,984 | 8.7 | 9,899 | 180 | |
| NeuralILTTrainable Parameters=7,787,9052026.04 | 7,104 | 8.6 | 9,546 | 281 | |
| CFNOTrainable Parameters=1,867,0732026.04 | 20,325 | 0.7 | 2,609 | 76 | |
| GAN-OPCTrainable Parameters=20,559,6522026.04 | 21,219 | 0.3 | 705 | 148 |