LithoBench
Benchmarks
TaskDatasetSOTA resultTrendResults
LithoBench StdMetal Metal Layer In-distribution
13,203L2 Error
12
LithoBench StdContact (Via Layer, OOD)
18,720L2 Error (Via Layer OOD)
11
LithoBench ViaSet Via Layer
4,268L2 Error
11
LithoBench ViaSet 45 nm via-layer ILT (test)
4,974L2 Error
5
LithoBench MetalSet 32 nm metal-layer ILT (test)
31,915L2 Error
5