Inverse Lithography Technology on LithoBench ViaSet Via Layer
4,268L2 ErrorMultiLevel
Evaluation results
| Method | Links | ||||
|---|---|---|---|---|---|
| MultiLevelCategory=Optimization Approaches, Avg. Time (s)=1.030, Avg. Rank=5.62026.05 | 4,268 | 8,370 | 0 | 1,434 | |
| LithoGRPO (SFT)Category=Our Approach, Protocol=SFT, Avg. Time (s)=0.104, Avg. Rank=4.72026.05 | 4,270 | 7,751 | 0 | 989 | |
| LithoGRPO (RLFT)Category=Our Approach, Protocol=RLFT, Avg. Time (s)=0.104, Avg. Rank=4.32026.05 | 4,276 | 8,376 | 0 | 398 | |
| DOINNCategory=Learning Approaches, Avg. Time (s)=0.107, Avg. Rank=7.32026.05 | 4,382 | 7,836 | 0 | 968 | |
| ILILTCategory=Mixed Approach, Avg. Time (s)=0.441, Avg. Rank=5.92026.05 | 4,666 | 10,065 | 0 | 238 | |
| DAMOCategory=Learning Approaches, Avg. Time (s)=0.028, Avg. Rank=5.72026.05 | 5,081 | 9,962 | 0 | 176 | |
| CFNOCategory=Learning Approaches, Avg. Time (s)=0.040, Avg. Rank=7.42026.05 | 8,949 | 9,890 | 0.1 | 184 | |
| LevelSetCategory=Optimization Approaches, Avg. Time (s)=2.290, Avg. Rank=6.92026.05 | 9,632 | 10,197 | 4.7 | 64 | |
| LithoGRPO (Pretrain)Category=Our Approach, Protocol=Pretrain, Avg. Time (s)=0.104, Avg. Rank=6.62026.05 | 11,595 | 8,776 | 3.4 | 170 | |
| Neural-ILTCategory=Learning Approaches, Avg. Time (s)=0.025, Avg. Rank=6.52026.05 | 12,723 | 8,537 | 6.2 | 263 | |
| GAN-OPCCategory=Learning Approaches, Avg. Time (s)=0.010, Avg. Rank=7.42026.05 | 14,767 | 6,686 | 8.3 | 166 |