Inverse Lithography Technology on LithoBench StdContact (Via Layer, OOD)
18,720L2 Error (Via Layer OOD)LithoGRPO (SFT)
Evaluation results
| Method | Links | ||||
|---|---|---|---|---|---|
| LithoGRPO (SFT)Category=Our Approach, Protocol=SFT, Avg. Time (s)=0.104, Avg. Rank=4.72026.05 | 18,720 | 39,291 | 0 | 1,546 | |
| LithoGRPO (RLFT)Category=Our Approach, Protocol=RLFT, Avg. Time (s)=0.104, Avg. Rank=4.32026.05 | 19,102 | 41,359 | 0.2 | 889 | |
| MultiLevelCategory=Optimization Approaches, Avg. Time (s)=1.030, Avg. Rank=5.62026.05 | 20,497 | 43,405 | 0.4 | 1,473 | |
| Neural-ILTCategory=Learning Approaches, Avg. Time (s)=0.025, Avg. Rank=6.52026.05 | 25,422 | 41,537 | 3.2 | 265 | |
| ILILTCategory=Mixed Approach, Avg. Time (s)=0.441, Avg. Rank=5.92026.05 | 38,957 | 43,869 | 7.1 | 510 | |
| DAMOCategory=Learning Approaches, Avg. Time (s)=0.028, Avg. Rank=5.72026.05 | 50,445 | 35,673 | 26.7 | 458 | |
| LevelSetCategory=Optimization Approaches, Avg. Time (s)=2.290, Avg. Rank=6.92026.05 | 50,770 | 32,134 | 34.7 | 275 | |
| CFNOCategory=Learning Approaches, Avg. Time (s)=0.040, Avg. Rank=7.42026.05 | 70,740 | 17,950 | 55.1 | 396 | |
| DOINNCategory=Learning Approaches, Avg. Time (s)=0.107, Avg. Rank=7.32026.05 | 72,058 | 17,968 | 55.8 | 493 | |
| LithoGRPO (Pretrain)Category=Our Approach, Protocol=Pretrain, Avg. Time (s)=0.104, Avg. Rank=6.62026.05 | 77,289 | 15,445 | 63.9 | 377 | |
| GAN-OPCCategory=Learning Approaches, Avg. Time (s)=0.010, Avg. Rank=7.42026.05 | 81,378 | 4,931 | 73.2 | 276 |