Inverse Lithography Technology on LithoBench StdMetal Metal Layer In-distribution
13,203L2 ErrorMultiLevel
Evaluation results
| Method | Links | ||||
|---|---|---|---|---|---|
| MultiLevelCategory=Optimization Approaches, Avg. Time (s)=1.030, Avg. Rank=5.62026.05 | 13,203 | 23,755 | 0.1 | 1,240 | |
| ILILTCategory=Mixed Approach, Avg. Time (s)=0.441, Avg. Rank=5.92026.05 | 14,596 | 24,969 | 0.1 | 368 | |
| LithoGRPO (SFT)Category=Our Approach, Protocol=SFT, Avg. Time (s)=0.104, Avg. Rank=4.72026.05 | 14,756 | 22,468 | 0.2 | 675 | |
| LithoGRPO (RLFT)Category=Our Approach, Protocol=RLFT, Avg. Time (s)=0.104, Avg. Rank=4.32026.05 | 14,840 | 22,497 | 0.2 | 358 | |
| DAMOCategory=Learning Approaches, Avg. Time (s)=0.028, Avg. Rank=5.72026.05 | 16,120 | 23,796 | 0.2 | 418 | |
| LithoGRPO (Pretrain)Category=Our Approach, Protocol=Pretrain, Avg. Time (s)=0.104, Avg. Rank=6.62026.05 | 17,362 | 23,837 | 0.4 | 386 | |
| Neural-ILTCategory=Learning Approaches, Avg. Time (s)=0.025, Avg. Rank=6.52026.05 | 20,045 | 23,548 | 2.4 | 373 | |
| LevelSetCategory=Optimization Approaches, Avg. Time (s)=2.290, Avg. Rank=6.92026.05 | 21,526 | 27,769 | 3.5 | 145 | |
| MOSAICCategory=Optimization Approaches, Avg. Time (s)=0.940, Avg. Rank=9.82026.05 | 21,733 | 27,222 | 3.2 | 229 | |
| DOINNCategory=Learning Approaches, Avg. Time (s)=0.107, Avg. Rank=7.32026.05 | 25,913 | 25,749 | 4.5 | 313 | |
| GAN-OPCCategory=Learning Approaches, Avg. Time (s)=0.010, Avg. Rank=7.42026.05 | 25,929 | 23,715 | 4.6 | 457 | |
| CFNOCategory=Learning Approaches, Avg. Time (s)=0.040, Avg. Rank=7.42026.05 | 26,809 | 26,814 | 4.2 | 232 |