Inverse Lithography Technology on LithoBench MetalSet Metal Layer
27,893L2 ErrorMultiLevel
Evaluation results
| Method | Links | ||||
|---|---|---|---|---|---|
| MultiLevelCategory=Optimization Approaches, Avg. Time (s)=1.030, Avg. Rank=5.62026.05 | 27,893 | 41,372 | 2.5 | 1,250 | |
| LithoGRPO (RLFT)Category=Our Approach, Protocol=RLFT, Avg. Time (s)=0.104, Avg. Rank=4.32026.05 | 28,933 | 39,838 | 3.1 | 444 | |
| LithoGRPO (SFT)Category=Our Approach, Protocol=SFT, Avg. Time (s)=0.104, Avg. Rank=4.72026.05 | 29,123 | 40,722 | 2.8 | 803 | |
| ILILTCategory=Mixed Approach, Avg. Time (s)=0.441, Avg. Rank=5.92026.05 | 30,353 | 45,353 | 3.2 | 433 | |
| DAMOCategory=Learning Approaches, Avg. Time (s)=0.028, Avg. Rank=5.72026.05 | 32,579 | 41,173 | 5.4 | 523 | |
| LithoGRPO (Pretrain)Category=Our Approach, Protocol=Pretrain, Avg. Time (s)=0.104, Avg. Rank=6.62026.05 | 32,824 | 42,320 | 5.4 | 487 | |
| LevelSetCategory=Optimization Approaches, Avg. Time (s)=2.290, Avg. Rank=6.92026.05 | 34,712 | 50,113 | 5.4 | 263 | |
| MOSAICCategory=Optimization Approaches, Avg. Time (s)=0.940, Avg. Rank=9.82026.05 | 35,860 | 48,080 | 6.6 | 361 | |
| DOINNCategory=Learning Approaches, Avg. Time (s)=0.107, Avg. Rank=7.32026.05 | 36,409 | 41,929 | 7.4 | 519 | |
| Neural-ILTCategory=Learning Approaches, Avg. Time (s)=0.025, Avg. Rank=6.52026.05 | 36,670 | 42,666 | 7.3 | 476 | |
| GAN-OPCCategory=Learning Approaches, Avg. Time (s)=0.010, Avg. Rank=7.42026.05 | 43,414 | 41,290 | 8.7 | 574 | |
| CFNOCategory=Learning Approaches, Avg. Time (s)=0.040, Avg. Rank=7.42026.05 | 47,814 | 46,131 | 12.5 | 302 |