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LithoBench MetalSet dataset and benchmarks · SOTA2 Research

Research Datasets

LithoBench MetalSet

Benchmarks

Task NameDataset NameSOTA MethodSort

Task NameDataset NameSOTA ResultTrendResults

Inverse Lithography Technology

LithoBench MetalSet Metal Layer

27,893L2 Error

12

Popular tasks

Inverse Lithography Technology

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