ResearchTasksInverse Lithography TechnologyInverse Lithography TechnologyFollowBenchmarksDatasetSOTA methodSortMost resultsRecently updatedMost papersApplyDatasetSOTA methodMetricTrendResultsLast updatedLithoBench StdMetal Metal Layer In-distributionMultiLevel13,203L2 Error12Jun 2, 2026LithoBench MetalSet Metal LayerMultiLevel27,893L2 Error12Jun 2, 2026LithoBench StdContact (Via Layer, OOD)LithoGRPO (SFT)18,720L2 Error (Via Layer OOD)11Jun 2, 2026LithoBench ViaSet Via LayerMultiLevel4,268L2 Error11Jun 2, 2026