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Papers Benchmarks Datasets Tasks

Inverse Lithography Technology research benchmarks · SOTA2 Research

Inverse Lithography Technology

Benchmarks

Dataset NameSOTA MethodSort

Dataset NameSOTA methodMetricTrendResultsLast Updated

LithoBench StdMetal Metal Layer In-distribution

13,203L2 Error

12

Jun 2, 2026

LithoBench MetalSet Metal Layer

27,893L2 Error

12

Jun 2, 2026

LithoBench StdContact (Via Layer, OOD)

LithoGRPO (SFT)

18,720L2 Error (Via Layer OOD)

11

Jun 2, 2026

LithoBench ViaSet Via Layer

4,268L2 Error

11

Jun 2, 2026

Popular datasets

LithoBench LithoBench MetalSet

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