Mask Generation (OPC) on GAN-OPC synthetic 32 nm M1 (test)
8,107L2 DistanceMorphOPC
Evaluation results
| Method | Links | ||||
|---|---|---|---|---|---|
| MorphOPCTrainable Parameters=44,581,3772026.04 | 8,107 | 13.6 | 9,013 | 509 | |
| DAMOTrainable Parameters=97,545,0892026.04 | 8,472 | 14.7 | 8,949 | 862 | |
| NeuralILTTrainable Parameters=7,787,9052026.04 | 8,658 | 14.2 | 10,336 | 1,392 | |
| GAN-OPCTrainable Parameters=20,559,6522026.04 | 8,690 | 13.8 | 9,183 | 633 | |
| CFNOTrainable Parameters=1,867,0732026.04 | 9,020 | 13.1 | 10,297 | 461 |