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Inverse Lithography research benchmarks · SOTA2 Research

Inverse Lithography

Benchmarks

Dataset NameSOTA MethodSort

Dataset NameSOTA methodMetricTrendResultsLast Updated

ICCAD 2013 (Avg)

Ours-150 iterations

1.6EPE

17

May 14, 2026

0EPE

6

Feb 26, 2026

StdContact (Avg)

Ours-150 iterations

2EPE

6

Feb 26, 2026

Popular datasets

ICCAD StdContact StdMetal

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