ResearchTasksInverse LithographyInverse LithographyFollowBenchmarksDatasetSOTA methodSortMost resultsRecently updatedMost papersApplyDatasetSOTA methodMetricTrendResultsLast updatedICCAD 2013 (Avg)Ours-150 iterations1.6EPE17May 14, 2026StdMetal AvgDAC'230EPE6Feb 26, 2026StdContact (Avg)Ours-150 iterations2EPE6Feb 26, 2026