Inverse Lithography on StdMetal Avg
0EPEDAC'23
Evaluation results
| Method | Links | ||
|---|---|---|---|
| DAC'23EPE threshold=15nm2026.02 | 0 | 24,928 | |
| ISPD'25EPE threshold=15nm, Iterations=3002026.02 | 0 | 21,631 | |
| Ours-150 iterationsEPE threshold=15nm, Iterations=1502026.02 | 0 | 21,029.2 | |
| Ours (PT+RL)EPE threshold=3nm, Iterations=1502026.02 | 6.7 | 21,029.2 | |
| Ours (PT)EPE threshold=3nm, Iterations=1502026.02 | 7.2 | 21,507.6 | |
| ISPD'25EPE threshold=3nm, Iterations=3002026.02 | 11.4 | 19,083.8 |