Inverse Lithography on ICCAD 2013 (Avg)
1.6EPEOurs-150 iterations
Evaluation results
| Method | Links | |||||
|---|---|---|---|---|---|---|
| Ours-150 iterationsEPE threshold=15nm, Iterations=1502026.02 | 1.6 | 39,080.7 | — | — | — | |
| ISPD'25EPE threshold=15nm, Iterations=3002026.02 | 1.8 | 38,612.2 | — | — | — | |
| DAC'23EPE threshold=15nm2026.02 | 2.5 | 39,873 | — | — | — | |
| DAC'22EPE threshold=15nm2026.02 | 7.9 | 39,873 | — | — | — | |
| CFNOPre-trained on=GAN-OPC2026.04 | 8.5 | — | 114,601 | 115,637 | 256 | |
| MorphOPCPre-trained on=GAN-OPC2026.04 | 10.5 | — | 81,611 | 101,857 | 265 | |
| DAMOPre-trained on=GAN-OPC2026.04 | 11 | — | 87,110 | 96,464 | 294 | |
| NeuralILTPre-trained on=GAN-OPC2026.04 | 12.1 | — | 89,045 | 107,166 | 637 | |
| GAN-OPCPre-trained on=GAN-OPC2026.04 | 12.7 | — | 97,779 | 101,121 | 291 | |
| CFNOPre-trained on=Lithobench2026.04 | 12.7 | — | 91,112 | 94,991 | 628 | |
| DAMOPre-trained on=Lithobench2026.04 | 14.1 | — | 66,940 | 94,397 | 758 | |
| GAN-OPCPre-trained on=Lithobench2026.04 | 14.6 | — | 77,598 | 92,099 | 721 | |
| MorphOPCPre-trained on=Lithobench2026.04 | 15 | — | 63,268 | 90,465 | 736 | |
| NeuralILTPre-trained on=Lithobench2026.04 | 15.1 | — | 77,651 | 89,857 | 809 | |
| Ours (PT+RL)EPE threshold=3nm, Iterations=1502026.02 | 25.2 | 40,415.9 | — | — | — | |
| Ours (PT)EPE threshold=3nm, Iterations=1502026.02 | 27.3 | 40,524.1 | — | — | — | |
| ISPD'25EPE threshold=3nm, Iterations=3002026.02 | 32.8 | 38,611.5 | — | — | — |