Inverse Lithography on StdContact (Avg)
2EPEOurs-150 iterations
Evaluation results
| Method | Links | ||
|---|---|---|---|
| Ours-150 iterationsEPE threshold=15nm, Iterations=1502026.02 | 2 | 39,186.4 | |
| ISPD'25EPE threshold=15nm, Iterations=3002026.02 | 3.8 | 36,172 | |
| Ours (PT+RL)EPE threshold=3nm, Iterations=1502026.02 | 6.5 | 39,907.5 | |
| DAC'23EPE threshold=15nm2026.02 | 8.6 | 39,997 | |
| Ours (PT)EPE threshold=3nm, Iterations=1502026.02 | 9 | 39,160.4 | |
| ISPD'25EPE threshold=3nm, Iterations=3002026.02 | 40.4 | 32,969.6 |