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3D lithography mask simulation research benchmarks · SOTA2 Research

3D lithography mask simulation

Benchmarks

Dataset NameSOTA MethodSort

Dataset NameSOTA methodMetricTrendResultsLast Updated

3D lithography mask simulation 11.2 nm

2.8Rel. L2 Error

1

Mar 17, 2026

3D lithography mask simulation 13.5 nm

3.1Relative L2 Error

1

Mar 17, 2026

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3D lithography mask simulation

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