ResearchTasks3D lithography mask simulation3D lithography mask simulationFollowBenchmarksDatasetSOTA methodSortMost resultsRecently updatedMost papersApplyDatasetSOTA methodMetricTrendResultsLast updated3D lithography mask simulation 11.2 nmWGNO2.8Rel. L2 Error1Mar 17, 20263D lithography mask simulation 13.5 nmWGNO3.1Relative L2 Error1Mar 17, 2026