ResearchDatasets3D lithography mask simulation3D lithography mask simulationFollowBenchmarksTaskDatasetSOTA methodSortMost resultsRecently updatedMost papersApplyTaskDatasetSOTA resultTrendResults3D lithography mask simulation3D lithography mask simulation 11.2 nm2.8Rel. L2 Error13D lithography mask simulation3D lithography mask simulation 13.5 nm3.1Relative L2 Error1