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3D lithography mask simulation dataset and benchmarks · SOTA2 Research

Research Datasets

3D lithography mask simulation

Benchmarks

Task NameDataset NameSOTA MethodSort

Task NameDataset NameSOTA ResultTrendResults

3D lithography mask simulation

3D lithography mask simulation 11.2 nm

2.8Rel. L2 Error

1

3D lithography mask simulation

3D lithography mask simulation 13.5 nm

3.1Relative L2 Error

1

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3D lithography mask simulation

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