ResearchTasks2D lithography mask simulation2D lithography mask simulationFollowBenchmarksDatasetSOTA methodSortMost resultsRecently updatedMost papersApplyDatasetSOTA methodMetricTrendResultsLast updated2D lithography mask simulation 11.2 nm wavelength (test)PINN3.3Relative L2 Error2Mar 17, 20262D lithography mask simulation 13.5 nm wavelength (test)PINN3.1Relative L2 Error2Mar 17, 2026