ResearchDatasets2D lithography mask simulation2D lithography mask simulationFollowBenchmarksTaskDatasetSOTA methodSortMost resultsRecently updatedMost papersApplyTaskDatasetSOTA resultTrendResults2D lithography mask simulation2D lithography mask simulation 11.2 nm wavelength (test)3.3Relative L2 Error22D lithography mask simulation2D lithography mask simulation 13.5 nm wavelength (test)3.1Relative L2 Error2
2D lithography mask simulation2D lithography mask simulation 11.2 nm wavelength (test)3.3Relative L2 Error2
2D lithography mask simulation2D lithography mask simulation 13.5 nm wavelength (test)3.1Relative L2 Error2