ResearchBenchmarksAC Characterization on Single-fin GaN FinFET (AC @ VGS=0V, VDS=6V)Follow0.3672Cgs (fF)Baseline0.3470080.4833040.61960.755896May 31, 2026Evaluation ResultsMethodMethodLinksCgs (fF)Cgs (fF/mm)Cgd (fF)Cgd (fF/mm)Cds (fF)Cds (fF/mm)Ciss (fF)Ciss (fF/mm)Coss (fF)Coss (fF/mm)BaselineWeff (nm)=580Weff (nm)=5802026.050.3672633.10.050186.40.00376.40.4173719.50.053892.8Device D2Weff (nm)=940.1Weff (nm)=940.12026.050.79840.340.18191.470.00151.60.971,031.810.1815193.06Device D1Weff (nm)=1,555Weff (nm)=1,5552026.050.872560.70.165106.10.0010.6431.037667.10.166106.7