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CMP Modeling research benchmarks · SOTA2 Research

CMP Modeling

Benchmarks

Dataset NameSOTA MethodSort

Dataset NameSOTA methodMetricTrendResultsLast Updated

CMP Nanotopography (test)

Fully Convolutional Network based on U-Net

0.52L1 Error (nm)

2

May 7, 2026

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CMP Nanotopography

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