CMP Modeling on CMP Nanotopography (test)
0.52L1 Error (nm)Fully Convolutional Network based on U-Net
Evaluation results
| Method | Links | ||
|---|---|---|---|
| Fully Convolutional Network based on U-NetInference time (s)=8.12026.05 | 0.52 | 0.73 | |
| Yu Ji et al. (2023)Inference time (s)=25.02026.05 | 1.06 | 1.49 |