ResearchTasksLithography Hotspot DetectionLithography Hotspot DetectionFollowBenchmarksDatasetSOTA methodSortMost resultsRecently updatedMost papersApplyDatasetSOTA methodMetricTrendResultsLast updatedFABFedKD-hybrid88.89Accuracy15May 1, 2026ICCADFedKD-hybrid95.67Accuracy15May 1, 2026