ResearchBenchmarksMissing Data Imputation on WaferMissing Data Imputation on WaferFollow0.093MSETKAE0.074280.200640.3270.45336May 9, 2018Evaluation resultsMethodMethodLinksMSECorrelation CoefficientTKAElatent_dimension=10, c...latent_dimension=10, cell_type=LSTM×2, scheduled_sampling_prob=1, l2_regularization=02018.050.0930.964DAElatent_dimension=10, a...latent_dimension=10, activation=linear, l2_regularization=0, tied_weights=false2018.050.1990.935LOCF2018.050.2260.911Mean Imp.2018.050.5610.695