Local thickness and composition measurements from scanning convergent-beam electron diffraction of a binary non-crystalline material obtained by a pixelated detector

We measured the local composition and thickness of SiO2-based glass material from diffraction. By using four dimensional scanning transmission electron microscopy (4D-STEM), we obtained diffraction at each scanning point. Comparing the obtained diffraction with simulated diffraction patterns, we try to measure the local composition and thickness. Although this method requires some constraints, this method measured local composition and thickness with 1/10 or less electron dose of EELS.

K. Nakazawa, K. Mitsuishi, K. Shibata, S. Amma, T. Mizoguchi · 2020