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GPU-accelerated physical model for the curvilinear mask era.
GPU-accelerated physical model for the curvilinear mask era. Provides mask-simulation products with accuracy for leading-edge nodes including EUV and multi-beam applications, refined over seven generations of test chips.
Platforms, integrations, and language support vary by plan and region. Confirm final requirements with the vendor.
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Compliance claims are normalized from current vendor documentation and independently reviewed by SOTA2.