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GPU-accelerated, model-based mask data preparation (MB-MDP) solution for complex masks including Manhattanized, curvilinear, and ideal ILT shapes.
GPU-accelerated, model-based mask data preparation (MB-MDP) solution for complex masks including Manhattanized, curvilinear, and ideal ILT shapes. Reduces eBeam shot count by 20–30% or more while improving wafer quality through built-in mask process correction (MPC).
Platforms, integrations, and language support vary by plan and region. Confirm final requirements with the vendor.
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Compliance claims are normalized from current vendor documentation and independently reviewed by SOTA2.