Fault Detection on Semiconductor wafers 10000 x 10000 resolution (test)
94.74AccuracyCNN with collinearity
Evaluation results
| Method | Links | ||
|---|---|---|---|
| CNN with collinearityCollinearity Configuration=12026.03 | 94.74 | 5.26 | |
| CNN without collinearity (IECON 2020)baseline=IECON 20202026.03 | 93.5 | 6.5 | |
| CNN with collinearityCollinearity Configuration=22026.03 | 93.04 | 6.96 |