# Kinetically Controlled Condensation Boundary Governing Indium Incorporation in InGaN Metal Organic Vapor Phase Epitaxy

Source: [Kinetically Controlled Condensation Boundary Governing Indium Incorporation in InGaN Metal Organic Vapor Phase Epitaxy](<https://www.sota2.com/research/paper/6a434d8fba73165dbb743b07>)

Collection index: [llms.txt](<https://www.sota2.com/research/llms.txt>)

Data updated: 2026-07-01T05:00:12.177Z

Authors: Qihui Lin, Junlin Wu, Erqi Xu, Jiaqing Yue, Jiale Wang, Zihao Xu, Haixin Qi, Liyi Luo, Haitao Wang, Jia Wang, Hiroshi Amano, Bo Shen, Guangxu Ju

Published: 2026-06-28T02:58:03.000Z

## Abstract

We combine in situ synchrotron X-ray crystal truncation rod measurements with a binary Burton-Cabrera-Frank model to quantify indium incorporation during InGaN growth by metal-organic vapor phase epitaxy (MOVPE) on GaN(0001). By distinguishing In adatoms from condensed droplets and incorporating coupled Ga-In incorporation kinetics, the model captures the intrinsically nonlinear dependence of indium composition on precursor flux and growth temperature. The critical In coverage corresponding to the maximum attainable In composition at a given temperature is determined by a kinetic balance between In adatom supply and incorporation capacity, defining a kinetically controlled condensation boundary that shifts with temperature and Ga flux. The model quantitatively predicts this boundary, in agreement with independent measurements, and provides a predictive framework for optimizing high-In-content InGaN growth while avoiding droplet formation.

## Recorded benchmark results

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## Original sources and implementation

[Original paper](<https://arxiv.org/abs/2606.29163>)

[PDF](<https://arxiv.org/pdf/2606.29163.pdf>)
