# Kinetics studies on $\\kappa$ to $\\beta$-Ga$\_2$O$\_3$ phase transformations via in-situ high temperature X-ray diffraction

Source: [Kinetics studies on $\\kappa$ to $\\beta$-Ga$\_2$O$\_3$ phase transformations via in-situ high temperature X-ray diffraction](<https://www.sota2.com/research/paper/69d48fdf7d0172140ec74736>)

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Data updated: 2026-04-08T05:00:12.103Z

Authors: Jingyu Tang, Po-Sen Tseng, Kunyao Jiang, Rachel C. Kurchin, Robert F. Davis, Lisa M. Porter

Published: 2026-04-05T23:42:43.000Z

## Abstract

The kinetics of the $\\kappa$ to $\\beta$-Ga$\_2$O$\_3$ phase transformation were investigated in five batches of nominally phase-pure $\\kappa$-Ga2O3 thin films heteroepitaxially grown on c-plane sapphire, with film thickness ranging from 700 to 1100 nm, using in-situ high-temperature X-ray diffraction. Phase fractions were quantitatively extracted through modified Rietveld refinement that accounts for preferred orientation, and the transformation kinetics were analyzed using the Johnson-Mehl-Avrami-Kolmogorov (JMAK) model. The applicability of the JMAK model to thin-film materials was evaluated and its lower and upper bounds for thin films and bulk materials were established. Based on this analysis, a method specifically suited for thin-film kinetic studies was developed and yielded reproducible and robust results across all five sample batches. The results indicate that the $\\kappa$ to $\\beta$ phase transformation in ~700-1100 nm films is best described as an interface-controlled, site-saturated nucleation with thickness-limited or effectively two-dimensional growth.

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## Original sources and implementation

[Original paper](<https://arxiv.org/abs/2604.04318>)

[PDF](<https://arxiv.org/pdf/2604.04318.pdf>)
