# Automatic Error Detection in Integrated Circuits Image Segmentation: A Data-driven Approach

Source: [Automatic Error Detection in Integrated Circuits Image Segmentation: A Data-driven Approach](<https://www.sota2.com/research/paper/68fa6dd81e209131cea3c5a6>)

Collection index: [llms.txt](<https://www.sota2.com/research/llms.txt>)

Data updated: 2025-10-26T00:44:11.594Z

Authors: Zhikang Zhang, Bruno Machado Trindade, Michael Green, Zifan Yu, Christopher Pawlowicz, Fengbo Ren

Published: 2022-11-08T00:58:10.000Z

## Abstract

Due to the complicated nanoscale structures of current integrated circuits(IC) builds and low error tolerance of IC image segmentation tasks, most existing automated IC image segmentation approaches require human experts for visual inspection to ensure correctness, which is one of the major bottlenecks in large-scale industrial applications. In this paper, we present the first data-driven automatic error detection approach targeting two types of IC segmentation errors: wire errors and via errors. On an IC image dataset collected from real industry, we demonstrate that, by adapting existing CNN-based approaches of image classification and image translation with additional pre-processing and post-processing techniques, we are able to achieve recall/precision of 0.92/0.93 in wire error detection and 0.96/0.90 in via error detection, respectively.

## Recorded benchmark results

A research result applies to its stated dataset, split, metric and evaluation configuration. Compare like-for-like settings, preserve the metric's unit and direction, and distinguish paper-reported results from independent reproduction. The best result recorded here is not a claim of exhaustive, current global coverage.

## Original sources and implementation

[Original paper](<https://arxiv.org/abs/2211.03927>)

[PDF](<https://arxiv.org/pdf/2211.03927.pdf>)
