# Amorphous carbon film deposition on inner surface of tubes using atmospheric pressure pulsed filamentary plasma source

Source: [Amorphous carbon film deposition on inner surface of tubes using atmospheric pressure pulsed filamentary plasma source](<https://www.sota2.com/research/paper/68fa2fbf1e209131ce86ee88>)

Collection index: [llms.txt](<https://www.sota2.com/research/llms.txt>)

Data updated: 2025-10-24T17:45:21.761Z

Authors: Ramasamy Pothiraja, Nikita Bibinov, Peter Awakowicz

Published: 2011-04-24T09:37:11.000Z

## Abstract

Uniform amorphous carbon film is deposited on the inner surface of quartz tube having the inner diameter of 6 mm and the outer diameter of 8 mm. A pulsed filamentary plasma source is used for the deposition. Long plasma filaments (~ 140 mm) as a positive discharge are generated inside the tube in argon with methane admixture. FTIR-ATR, XRD, SEM, LSM and XPS analyses give the conclusion that deposited film is amorphous composed of non-hydrogenated sp2 carbon and hydrogenated sp3 carbon. Plasma is characterized using optical emission spectroscopy, voltage-current measurement, microphotography and numerical simulation. On the basis of observed plasma parameters, the kinetics of the film deposition process is discussed.

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## Original sources and implementation

[Original paper](<https://arxiv.org/abs/1104.4613>)

[PDF](<https://arxiv.org/pdf/1104.4613.pdf>)